Maria Gromova

Poly-SiGe, a superb material for MEMS

Ann Witvrouw, Maria Gromova, Anshu Mehta et al. · MRS Proceedings · 2003 · 38 citations

Materials Science, Engineering, Microfabrication +4

Novel high growth rate processes for depositing poly-SiGe structural layers at CMOS compatible temperatures

Ankit Nalin Mehta, Maria Gromova, Cristina Rusu et al. · 2004 · 30 citations

Engineering, Multilayer Process, Silicon On Insulator +16

Characterization and strain gradient optimization of PECVD poly-SiGe layers for MEMS applications

Maria Gromova, Ankit Nalin Mehta, Kris Baert et al. · Sensors and Actuators A Physical · 2006 · 30 citations

Electrical Engineering, Wafer Scale Processing, Engineering +11

Characterization of KrF excimer laser annealed PECVD SixGe1−x for MEMS post-processing

Sherif Sedky, Maria Gromova, Tom Van der Donck et al. · Sensors and Actuators A Physical · 2006 · 27 citations

Materials Science, Electrical Engineering, Advanced Laser Processing +7

Improved adsorption of choline oxidase on a polyelectrolyte LBL film in the presence of iodide anions

Maria Gromova, Larisa V. Sigolaeva, Michael A. Fastovets et al. · Soft Matter · 2011 · 21 citations

Engineering, Polyelectrolyte Lbl Film, Chemistry +20