Statistics
Publications
1
Citations
12
H-Index
1
Active since
2008
Affiliations
ASML (Netherlands)(Current)
Maarten Hoeks is an author at ASML (Netherlands) specializing in electrical engineering, device fabrication, and optical lithography.
Publications per year
2008–2008
1
1
SLM device for 193 nm lithographic applications
John Lauria, Ronald Albright, Olga Vladimirsky et al. · Microelectronic Engineering · 2008 · 12 citations
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