Luoqi Chen

An innovative Source-Mask co-Optimization (SMO) method for extending low k1 imaging

Stephen Hsu, Luoqi Chen, Zhipan Li et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 50 citations

Image Reconstruction, Engineering, Optic Design +24

Fast and accurate 3D mask model for full-chip OPC and verification

Peng Liu, Yu Cao, Luoqi Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 47 citations

Engineering, Vlsi Design, Electron-beam Lithography +25

Development of layout split algorithms and printability evaluation for double patterning technology

Tsann-Bim Chiou, Robert Socha, Hong Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 38 citations

Pattern Split, Engineering, Electron-beam Lithography +19

Optimized hardware and software for fast full-chip simulation

Yu Cao, Yen‐Wen Lu, Luoqi Chen et al. · Optical Microlithography XVIII · 2005 · 26 citations

Source-mask co-optimization: optimize design for imaging and impact of source complexity on lithography performance

Stephen Hsu, Zhipan Li, Luoqi Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 23 citations

Search Optimization, Engineering, Electron-beam Lithography +15