Bert van Drieenhuizen

Performance of FlexRay: a fully programmable illumination system for generation of freeform sources on high NA immersion systems

Melchior Mulder, André Engelen, O.F.J. Noordman et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 50 citations

Engineering, Biomedical Engineering, Biomedical Optics +7

Highly reliable CMOS-integrated 11MPixel SiGe-based micro-mirror arrays for high-end industrial applications

L. Haspeslagh, Jeroen De Coster, Olalla Varela Pedreira et al. · 2008 · 31 citations

Engineering, Electrical Engineering, Microelectronics +16

11-Megapixel CMOS-Integrated SiGe Micromirror Arrays for High-End Applications

Ann Witvrouw, L. Haspeslagh, Olalla Varela Pedreira et al. · Journal of Microelectromechanical Systems · 2010 · 29 citations

Engineering, Electrical Engineering, Microelectronics +16

Performance of a programmable illuminator for generation of freeform sources on high NA immersion systems

Melchior Mulder, André Engelen, O.F.J. Noordman et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 24 citations

Natural Sciences, Electrical Engineering, Optical Materials +8

SLM device for 193 nm lithographic applications

John Lauria, Ronald Albright, Olga Vladimirsky et al. · Microelectronic Engineering · 2008 · 12 citations

Engineering, Electrical Engineering, Materials Science +8