Melchior Mulder

Performance of FlexRay: a fully programmable illumination system for generation of freeform sources on high NA immersion systems

Melchior Mulder, André Engelen, O.F.J. Noordman et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 50 citations

Engineering, Biomedical Engineering, Biomedical Optics +7

Industrialization of a robust EUV source for high-volume manufacturing and power scaling beyond 250W

Igor V. Fomenkov, A. A. Schafgans, Yezheng Tao et al. · 2018 · 43 citations

Natural Sciences, Manufacturing Engineering, Physics +11

Generation of arbitrary freeform source shapes using advanced illumination systems in high-NA immersion scanners

Jörg Zimmermann, Paul Gräupner, Jens Timo Neumann et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 26 citations

Engineering, Electrical Engineering, Digital Imaging +12

Performance of a programmable illuminator for generation of freeform sources on high NA immersion systems

Melchior Mulder, André Engelen, O.F.J. Noordman et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 24 citations

Natural Sciences, Electrical Engineering, Optical Materials +8

Freeform illumination sources: an experimental study of source-mask optimization for 22-nm SRAM cells

Joost Bekaert, Bart Laenens, Staf Verhaegen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 23 citations

Engineering, Computer Engineering, Electrical Engineering +9