Concepedia

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Demagnification in proximity x-ray lithography and extensibility to 25 nm by optimizing Fresnel diffraction

DOI

54

Citations

2

References

1999

Year

Yuli Vladimirsky, A. J. Bourdillon, Olga Vladimirsky, Wenlong Jiang, Q. Leonard
Journal of Physics D Applied Physics

Abstract

10.1088/0022-3727/32/22/102

References

YearCitations

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