L. Grella

Hard x-ray phase zone plate fabricated by lithographic techniques

Barry Lai, W. Yun, D. Legnini et al. · Applied Physics Letters · 1992 · 122 citations

Engineering, Microscopy, Optical Testing +18

Development of a hard x-ray imaging microscope

Barry Lai, W. Yun, Yanan Xiao et al. · Review of Scientific Instruments · 1995 · 81 citations

X-ray Spectroscopy, Visible Light, Engineering +21

High-performance multilevel blazed x-ray microscopy Fresnel zone plates: Fabricated using x-ray lithography

Enzo Di Fabrizio, M. Gentili, L. Grella et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 81 citations · Full text

Short Wavelength Optic, Optical Materials, Engineering +26

REBL: design progress toward 16 nm half-pitch maskless projection electron beam lithography

M. A. McCord, Paul Petric, Upendra Ummethala et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 42 citations

Engineering, Vlsi Design, Electron-beam Lithography +18

REBL: A novel approach to high speed maskless electron beam direct write lithography

Paul Petric, Chris Bevis, Allen Carroll et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 33 citations

Engineering, Electron-beam Lithography, Microscopy +20