Statistics
Publications
3
Citations
86
H-Index
3
Active since
2010
Affiliations
KLA (United States)(Current)
Upendra Ummethala is an author at KLA (United States) specializing in throughput improvement, maskless lithography, and engineering.
Publications per year
2010–2012
3
3
REBL: design progress toward 16 nm half-pitch maskless projection electron beam lithography
M. A. McCord, Paul Petric, Upendra Ummethala et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 42 citations
Engineering, Electrical Engineering, Digital Fabrication +14
Reflective electron-beam lithography: progress toward high-throughput production capability
Regina Freed, Thomas Gubiotti, Jeff Sun et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 21 citations
Engineering, Electrical Engineering, Manufacturing Engineering +12
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