Statistics
Publications
3
Citations
61
H-Index
3
Active since
2010
Affiliations
Regina Freed is an author at KLA (United States) specializing in maskless lithography, throughput improvement, and manufacturing engineering.
Publications per year
2010–2013
3
3
Reflective electron-beam lithography: progress toward high-throughput production capability
Regina Freed, Thomas Gubiotti, Jeff Sun et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 21 citations
Engineering, Electrical Engineering, Manufacturing Engineering +12
1–3 of 3