Thomas Gubiotti

Publications

Citations

H-Index

2002

Active since

Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)(Current)

Thomas Gubiotti is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in applied physics, engineering, and electronic packaging.

Top concepts

EngineeringApplied PhysicsMicroscopyMicrofabricationElectronic PackagingElectrical EngineeringPhysics3D PrintingReflectanceSpectroscopy

Publications per year

2002–2013

Publications

Reflective electron-beam lithography: progress toward high-throughput production capability

Regina Freed, Thomas Gubiotti, Jeff Sun et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 20 citations

Nm Half Pitch, Electrical Engineering, Wafer Scale Processing +13

Reflective electron beam lithography: lithography results using CMOS controlled digital pattern generator chip

Thomas Gubiotti, Jeff Sun, Regina Freed et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 16 citations

Engineering, Electron-beam Lithography, Pattern Transfer +16

Normal-incidence spectroscopic ellipsometry and polarized reflectometry for measurement and control of photoresist critical dimension

James M. Holden, Thomas Gubiotti, William A. McGahan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 16 citations

Optical Materials, Engineering, Electron-beam Lithography +21

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