Concepedia

Author

Jeff Sun

Taiwan Semiconductor Manufacturing Company (Taiwan)

Also Known As

Jeff Fuge Sun, Jeff Sun

5

Publications

50

Citations

4

H-Index

10

Concepts

All Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)KLA (United States)
JS

About

Jeff Sun is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in microfabrication, engineering, and applied physics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

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36

2

Applied Physics

2

2

36

3

Electrical Engineering

2

2

36

4

Computer Engineering

1

1

20

5

Microelectronics

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1

16

Jeff Sun

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2

Publications

36

Citations

2

H-Index

YearCitations

Reflective electron-beam lithography: progress toward high-throughput production capability

Regina Freed, Thomas Gubiotti, Jeff Sun,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2012

20

Reflective electron beam lithography: lithography results using CMOS controlled digital pattern generator chip

Thomas Gubiotti, Jeff Sun, Regina Freed,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2013

16

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