Concepedia

Jeff Sun

JS

2

Publications

36

Citations

2

H-Index

2012

Active since

Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)(Current)

KLA (United States)

Jeff Sun is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in microfabrication, engineering, and applied physics.

Top concepts

EngineeringApplied PhysicsMicrofabricationElectronic PackagingElectrical EngineeringMicroscopy3D PrintingOptoelectronicsMicroelectronicsComputer Engineering

Publications per year

2012–2013

2

Publications

2

Reflective electron-beam lithography: progress toward high-throughput production capability

Regina Freed, Thomas Gubiotti, Jeff Sun et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 20 citations

Nm Half Pitch, Electrical Engineering, Wafer Scale Processing +13

Reflective electron beam lithography: lithography results using CMOS controlled digital pattern generator chip

Thomas Gubiotti, Jeff Sun, Regina Freed et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 16 citations

Engineering, Electron-beam Lithography, Pattern Transfer +16

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