Concepedia

James M. Holden

JM

1

Publications

16

Citations

1

H-Index

2002

Active since

Affiliations

Mapper Lithography (Netherlands)(Current)

James M. Holden is an author at Mapper Lithography (Netherlands) specializing in optical characterization, optical tolerancing, and ophthalmology.

Top concepts

PhysicsMicroscopyEngineeringReflectanceSpectroscopyOphthalmologyApplied PhysicsNatural SciencesOptical MaterialsOptical Properties

Publications per year

2002–2002

1

Publications

1

Normal-incidence spectroscopic ellipsometry and polarized reflectometry for measurement and control of photoresist critical dimension

James M. Holden, Thomas Gubiotti, William A. McGahan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 16 citations

Optical Materials, Engineering, Electron-beam Lithography +21

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