P. M. Lenahan

What can electron paramagnetic resonance tell us about the Si/SiO2 system?

P. M. Lenahan, John F. Conley · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 341 citations

Paramagnetic Resonance, Engineering, Magnetic Resonance +19

Defects and impurities in thermal oxides on silicon

K. L. Brower, P. M. Lenahan, P. V. Dressendorfer · Applied Physics Letters · 1982 · 95 citations

Materials Science, Ion Implantation, Engineering +10

Identification of a silicon vacancy as an important defect in 4H SiC metal oxide semiconducting field effect transistor using spin dependent recombination

Corey J. Cochrane, P. M. Lenahan, Aivars J. Lelis · Applied Physics Letters · 2012 · 67 citations

Spintronics, Electrical Engineering, Sdr Response +11

Electron-spin-resonance study of defects in plasma-enhanced chemical vapor deposited silicon nitride

D. Jousse, Jerzy Kanicki, D. T. Krick et al. · Applied Physics Letters · 1988 · 54 citations

Engineering, Silicon On Insulator, Semiconductor Device +18

Electron spin resonance study of interface defects in atomic layer deposited hafnium oxide on Si

A.Y. Kang, P. M. Lenahan, John F. Conley et al. · Applied Physics Letters · 2002 · 54 citations · Full text

Engineering, Silicon On Insulator, Defect Tolerance +17