David Ockwell

ASML's NXE platform performance and volume introduction

Rudy Peeters, Sjoerd Lok, Erwin van Alphen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 71 citations

Engineering, Computer Engineering, Manufacturing Engineering +7

EUV into production with ASML's NXE platform

Christian Wagner, Noreen Harned, Peter Kuerz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 43 citations

Engineering, Manufacturing Engineering, Microelectronics +7

NXE pellicle: offering a EUV pellicle solution to the industry

Derk Brouns, Aage Bendiksen, Pär Broman et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 36 citations

Engineering, Materials Engineering, Biomedical Imaging +10

EUV lithography at chipmakers has started: performance validation of ASML's NXE:3100

Christian Wagner, Jose Bacelar, Noreen Harned et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 33 citations

Engineering, Manufacturing Engineering, Computer-integrated Manufacturing +13

From performance validation to volume introduction of ASML's NXE platform

H. Meiling, Wim de Boeij, Frank Bornebroek et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 27 citations

Engineering, Manufacturing Engineering, Microelectromechanical Systems +8