Michael Toeller

Metal‐Insulator Transition in ALD VO₂ Ultrathin Films and Nanoparticles: Morphological Control

Antony Premkumar Peter, Koen Martens, Geert Rampelberg et al. · Advanced Functional Materials · 2014 · 85 citations

Natural Sciences, Materials Engineering, Materials Science +12

Process Study and Characterization of VO₂Thin Films Synthesized by ALD Using TEMAV and O₃Precursors

Peter Antony Premkumar, Michael Toeller, Iuliana Radu et al. · ECS Journal of Solid State Science and Technology · 2012 · 51 citations

Natural Sciences, Materials Engineering, Materials Science +17

Crystallization and semiconductor-metal switching behavior of thin VO2 layers grown by atomic layer deposition

Geert Rampelberg, Davy Deduytsche, Bob De Schutter et al. · Thin Solid Films · 2013 · 44 citations

Natural Sciences, Materials Engineering, Materials Science +14

Hydrogen-Induced Resistive Switching in TiN/ALD $ \hbox{HfO}_{2}$/PEALD TiN RRAM Device

Yang Yin Chen, L. Goux, Johan Swerts et al. · IEEE Electron Device Letters · 2012 · 33 citations

Natural Sciences, Materials Engineering, Materials Science +15

NiO Thin Films Synthesized by Atomic Layer Deposition using Ni(dmamb)₂ and Ozone as Precursors

Peter Antony Premkumar, Michael Toeller, Christoph Adelmann et al. · Chemical Vapor Deposition · 2012 · 30 citations

Natural Sciences, Materials Engineering, Materials Science +17