Stephan E. Lassig

Impact of Si DRIE on Vibratory MEMS Gyroscope Performance

P. Merz, W. Pilz, Frank Senger et al. · TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference · 2007 · 25 citations

Engineering, Quadrature Error, Measurement +13

Control of Plasma Damage to Gate Oxide during High Density Plasma Chemical Vapor Deposition

Subhas Bothra, Calvin T. Gabriel, Stephan E. Lassig et al. · Journal of The Electrochemical Society · 1995 · 24 citations

High Density, Electrical Engineering, Gate Oxide +12

Kinetics of Rapid Thermal Oxidation of Silicon

Stephan E. Lassig, Thomas J. Debolske, John L. Crowley · MRS Proceedings · 1987 · 21 citations

Chemical Engineering, Engineering, Rapid Thermal Oxidation +7

Review of trench and via plasma etch issues for copper dual damascene in undoped and fluorine-doped silicate glass oxide

D. Keil, B. A. Helmer, Stephan E. Lassig · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 18 citations

Engineering, Electron-beam Lithography, Optical Glass +17

Characterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformity

Kurt Olson, David E. Kotecki, Anthony J. Ricci et al. · Review of Scientific Instruments · 1995 · 13 citations

Electrical Engineering, Wafer Scale Processing, Engineering +12