Stephan E. Lassig - Concepedia

Author

Stephan E. Lassig

Also Known As

S. Lassig, S.E. Lassig, Stephan E Lassig, Stephan E. Lassig, Stephan Lassig

Publications

135

Citations

H-Index

Concepts

All Affiliations

Stephan E. Lassig is an author at Lam Research (United States) specializing in engineering, microelectronics, and applied physics.

#	Concept	H-Index	Publications	Citations
1	Engineering	5	5	101
2	Applied Physics	3	3	55
3	Electrical Engineering	3	3	55
4	Education	1	1	25
5	Chemical Engineering	1	1	21

Stephan E. Lassig

Publications

101

Citations

H-Index

Page 1

	Year	Citations
Impact of Si DRIE on Vibratory MEMS Gyroscope Performance P. Merz, W. Pilz, Frank Senger, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference EngineeringQuadrature ErrorMeasurementMicrofabricationCalibration	2007	25
Control of Plasma Damage to Gate Oxide during High Density Plasma Chemical Vapor Deposition Subhas Bothra, Calvin T. Gabriel, Stephan E. Lassig, Journal of The Electrochemical Society High DensityElectrical EngineeringGate OxideEngineeringGate Oxide Damage	1995	24
Kinetics of Rapid Thermal Oxidation of Silicon Stephan E. Lassig, Thomas J. Debolske, John L. Crowley MRS Proceedings Chemical EngineeringEngineeringRapid Thermal OxidationOxidation ResistanceThermodynamics	1987	21
Review of trench and via plasma etch issues for copper dual damascene in undoped and fluorine-doped silicate glass oxide D. Keil, B. A. Helmer, Stephan E. Lassig Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringElectron-beam LithographyOptical GlassGlass MaterialBeam Lithography	2003	18
Characterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformity Kurt Olson, David E. Kotecki, Anthony J. Ricci, Review of Scientific Instruments Electrical EngineeringWafer Scale ProcessingEngineeringMicrofabricationSurface Science	1995	13

Page 1