Concepedia

Calvin T. Gabriel

CT

Statistics

Publications

13

Citations

265

H-Index

11

Active since

1989

Affiliations

Lam Research (United States)(Current)

Advanced Micro Devices (United States)

Philips (United States)

Vi Technology (United States)

Calvin T. Gabriel is an author at Lam Research (United States) specializing in engineering, electrical engineering, and semiconductor devices.

Publications per year

1989–2002

13

Publications

13

Gate oxide damage from polysilicon etching

Calvin T. Gabriel · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 69 citations

, , +17

Control of Plasma Damage to Gate Oxide during High Density Plasma Chemical Vapor Deposition

Subhas Bothra, Calvin T. Gabriel, Stephan E. Lassig et al. · Journal of The Electrochemical Society · 1995 · 24 citations

, , +17

Gate oxide damage reduction using a protective dielectric layer

Calvin T. Gabriel, Milind Weling · IEEE Electron Device Letters · 1994 · 23 citations

, , +17

A simple wafer-level measurement technique for predicting oxide reliability

S.R. Nariani, Calvin T. Gabriel · IEEE Electron Device Letters · 1995 · 23 citations

, , +16

Reduced Device Damage Using An Ozone Based Photoresist Removal Process

Calvin T. Gabriel, James C. Mitchener · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1989 · 21 citations

, , +13

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