Statistics
Publications
3
Citations
110
H-Index
3
Active since
1994
Affiliations
University of Arizona(Current)
Milind Weling is an author at University of Arizona specializing in engineering, microelectronics, and microfabrication.
Publications per year
1994–2009
3
3
Minimization of chemical-mechanical planarization (CMP) defects and post-CMP cleaning
Liming Zhang, Srini Raghavan, Milind Weling · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 76 citations
Engineering, Industrial Engineering, Mechanical Engineering +20
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