Statistics
Publications
21
Citations
926
H-Index
18
Active since
1999
Liming Zhang is an author at Hainan Medical University specializing in engineering, medicine, and nanomedicine.
Publications per year
1999–2024
21
21
Minimization of chemical-mechanical planarization (CMP) defects and post-CMP cleaning
Liming Zhang, Srini Raghavan, Milind Weling · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 76 citations
Engineering, Industrial Engineering, Mechanical Engineering +20
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