Kinetics of Rapid Thermal Oxidation of Silicon - Concepedia

Concepedia

Publication | Closed Access

Kinetics of Rapid Thermal Oxidation of Silicon

21

Citations

3

References

1987

Year

Stephan E. Lassig, Thomas J. Debolske, John L. Crowley

MRS Proceedings

Chemical EngineeringEngineeringRapid Thermal OxidationOxidation ResistanceThermodynamicsHeat TransferSilicon On InsulatorThermal EngineeringChemical KineticsSilicon Debugging

References

	Year	Citations

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