B. A. Helmer

Molecular dynamics simulations of Ar+ and Cl+ impacts onto silicon surfaces: Distributions of reflected energies and angles

B. A. Helmer, David B. Graves · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 91 citations

Cl+ Impacts, Engineering, Reflection Probabilities +25

Molecular dynamics simulations of fluorosilyl species impacting fluorinated silicon surfaces with energies from 0.1 to 100 eV

B. A. Helmer, David B. Graves · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 51 citations

Engineering, Computational Chemistry, Chemistry +21

Trapping dynamics of ethane on Si(100)-(2×1): Molecular beam experiments and molecular dynamics simulations

C. T. Reeves, B. A. Ferguson, C. Buddie Mullins et al. · The Journal of Chemical Physics · 1999 · 19 citations

Engineering, Computational Chemistry, Chemistry +19

Molecular dynamics simulations of Cl2+ impacts onto a chlorinated silicon surface: Energies and angles of the reflected Cl2 and Cl fragments

B. A. Helmer, David B. Graves · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 18 citations

Engineering, Computational Chemistry, Chemistry +21

Review of trench and via plasma etch issues for copper dual damascene in undoped and fluorine-doped silicate glass oxide

D. Keil, B. A. Helmer, Stephan E. Lassig · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 18 citations

Engineering, Electron-beam Lithography, Optical Glass +17