Concepedia

Author

B. A. Helmer

University of California, Berkeley

Also Known As

B. A. Helmer, B.A. Helmer

10

Publications

210

Citations

6

H-Index

27

Concepts

All Affiliations

University of California, BerkeleyLam Research (United States)
BA

About

B. A. Helmer is an author at University of California, Berkeley specializing in engineering, surface science, and applied physics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

6

6

207

2

Applied Physics

5

5

197

3

Natural Sciences

4

4

179

4

Chemistry

4

4

179

5

Chemical Engineering

1

1

10

B. A. Helmer

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6

Publications

207

Citations

6

H-Index

YearCitations

Molecular dynamics simulations of Ar+ and Cl+ impacts onto silicon surfaces: Distributions of reflected energies and angles

B. A. Helmer, David B. Graves

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

1998

91

Molecular dynamics simulations of fluorosilyl species impacting fluorinated silicon surfaces with energies from 0.1 to 100 eV

B. A. Helmer, David B. Graves

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

1997

51

Trapping dynamics of ethane on Si(100)-(2×1): Molecular beam experiments and molecular dynamics simulations

C. T. Reeves, B. A. Ferguson, C. Buddie Mullins,

The Journal of Chemical Physics

1999

19

Molecular dynamics simulations of Cl2+ impacts onto a chlorinated silicon surface: Energies and angles of the reflected Cl2 and Cl fragments

B. A. Helmer, David B. Graves

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

1999

18

Review of trench and via plasma etch issues for copper dual damascene in undoped and fluorine-doped silicate glass oxide

D. Keil, B. A. Helmer, Stephan E. Lassig

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

2003

18

Oxide Dual Damascene Trench Etch Profile Control

D. Keil, B. A. Helmer, G. Mueller,

Journal of The Electrochemical Society

2001

10

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