Gangadhara Raja Muthinti

Multi-technique x-ray and optical characterization of crystalline phase, texture, and electronic structure of atomic layer deposited Hf1−xZrxO2 gate dielectrics deposited by a cyclical deposition and annealing scheme

Relja Vasić, Steven Consiglio, Robert D. Clark et al. · Journal of Applied Physics · 2013 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +17

Sensitivity analysis and line edge roughness determination of 28-nm pitch silicon fins using Mueller matrix spectroscopic ellipsometry-based optical critical dimension metrology

Dhairya Dixit, Samuel O’Mullane, Sravan Sunkoju et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 23 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Effects of stress on the dielectric function of strained pseudomorphic Si1−xGex alloys from 0 to 75% Ge grown on Si (001)

Gangadhara Raja Muthinti, Manasa Medikonda, Thomas Adam et al. · Journal of Applied Physics · 2012 · 22 citations

Natural Sciences, Materials Engineering, Materials Science +17

Mueller based scatterometry measurement of nanoscale structures with anisotropic in-plane optical properties

Gangadhara Raja Muthinti, Manasa Medikonda, Jody Fronheiser et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 17 citations

Engineering, Electrical Engineering, Materials Science +17

Electrical test prediction using hybrid metrology and machine learning

John G. Gaudiello, Susan Emans, Michael Shifrin et al. · 2017 · 17 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17