Susan Emans

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Active since

2017

Affiliations

Nova Measuring Instruments (United States)(Current)

Nova Measuring Instruments (Israel)

IBM (United States)

Susan Emans is an author at Nova Measuring Instruments (United States) specializing in critical dimension control, device characterization, and instrumentation.

Publications per year

2017–2019

Publications

Electrical test prediction using hybrid metrology and machine learning

John G. Gaudiello, Susan Emans, Michael Shifrin et al. · 2017 · 17 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

Machine learning and hybrid metrology using scatterometry and LE-XRF to detect voids in copper lines

Dexin Kong, K. Motoyama, Abraham Arceo de la Peña et al. · 2019 · 10 citations

Engineering, Electrical Engineering, Materials Engineering +17

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