Concepedia

Y. Tamminga

YT

Statistics

Publications

38

Citations

1.7K

H-Index

23

Active since

1970

Affiliations

Philips (Netherlands)(Current)

Philips (Belgium)

Eindhoven University of Technology

Philips (Finland)

Y. Tamminga is an author at Philips (Netherlands) specializing in materials science, natural sciences, and materials engineering.

Publications per year

1970–2006

38

Publications

38

Island growth in the atomic layer deposition of zirconium oxide and aluminum oxide on hydrogen-terminated silicon: Growth mode modeling and transmission electron microscopy

Riikka L. Puurunen, Wilfried Vandervorst, W.F.A. Besling et al. · Journal of Applied Physics · 2004 · 156 citations

Natural Sciences, Materials Engineering, Materials Science +17

Characterization of Plasma Silicon Nitride Layers

W. A. P. Claassen, W. G. J. N. Valkenburg, F.H.P.M. Habraken et al. · Journal of The Electrochemical Society · 1983 · 153 citations

Natural Sciences, Materials Engineering, Materials Science +17

Critical review of the current status of thickness measurements for ultrathin SiO <sub>2</sub> on Si Part V: Results of a CCQM pilot study

M. P. Seah, Steven J. Spencer, Farid Bensebaa et al. · Surface and Interface Analysis · 2004 · 140 citations

Engineering, Materials Engineering, Materials Science +17

Thermal nitridation of silicon dioxide films

F.H.P.M. Habraken, A. E. T. Kuiper, Y. Tamminga et al. · Journal of Applied Physics · 1982 · 118 citations

Engineering, Materials Engineering, Materials Science +17

Deposition and composition of silicon oxynitride films

A. E. T. Kuiper, S. W. Koo, F.H.P.M. Habraken et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1983 · 93 citations

Natural Sciences, Materials Engineering, Materials Science +17

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