L. Desvoivres

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Publications

Citations

184

H-Index

Active since

1999

Affiliations

Laboratoire d'Électronique des Technologies de l'Information(Current)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

STMicroelectronics (France)

L. Desvoivres is an author at Laboratoire d'Électronique des Technologies de l'Information specializing in semiconductor devices, engineering, and etching processes.

Publications per year

1999–2020

Publications

X-ray photoelectron spectroscopy investigation of sidewall passivation films formed during gate etch processes

L. Desvoivres, L. Vallier, O. Joubert · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 55 citations

Natural Sciences, Materials Engineering, Materials Science +17

High Density Embedded PCM Cell in 28nm FDSOI Technology for Automotive Micro-Controller Applications

F. Arnaud, Paulo Ferreira, F. Piazza et al. · 2020 · 48 citations

Engineering, Automotive Engineering, Electrical Engineering +13

Sub-0.1 μm gate etch processes: Towards some limitations of the plasma technology?

L. Desvoivres, L. Vallier, O. Joubert · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 44 citations

Engineering, Materials Engineering, Materials Science +17

Thin gate oxide behavior during plasma patterning of silicon gates

L. Desvoivres, M. Bonvalot, O. Joubert · Applied Physics Letters · 1999 · 25 citations

Natural Sciences, Materials Science, Physics +17

Plasma etching and integration challenges using alternative patterning techniques for 11nm node and beyond

S. Barnola, Patricia Pimenta‐Barros, C. Arvet et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 12 citations

Engineering, Electrical Engineering, Microelectronics +16

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