Hans van der Laan

Aerial image measurement methods for fast aberration set-up and illumination pupil verification

Hans van der Laan, Marcel Dierichs, Henk van Greevenbroek et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 42 citations

Medicine, Mechatronics Engineering, Optics +13

High order field-to-field corrections for imaging and overlay to achieve sub 20-nm lithography requirements

Jan Mulkens, Michael Kubis, Paul Hinnen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 23 citations

Engineering, Computer Engineering, Biomedical Imaging +10

Understanding systematic and random CD variations using predictive modeling techniques

Donis G. Flagello, Hans van der Laan, Jan B. van Schoot et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 22 citations

Medicine, Digital Design, Digital Imaging +10

Integrated scatterometry for tight overlay and CD control to enable 20-nm node wafer manufacturing.

Jos Benschop, André Engelen, Hugo Cramer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 20 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17