Concepedia
1
Publications
42
Citations
H-Index
2001
Active since
Affiliations
ASML (Netherlands)(Current)
Marcel Dierichs is an author at ASML (Netherlands).
Publications per year
2001–2001
Aerial image measurement methods for fast aberration set-up and illumination pupil verification
Hans van der Laan, Marcel Dierichs, Henk van Greevenbroek et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 42 citations
Rows per page
1–1 of 1