Concepedia

Henk van Greevenbroek

HV

3

Publications

74

Citations

3

H-Index

2001

Active since

Affiliations

ASML (Netherlands)(Current)

Henk van Greevenbroek is an author at ASML (Netherlands) specializing in optoelectronics, ophthalmology, and computational imaging.

Top concepts

RadiologyMicroscopyEngineeringOphthalmologyOptical SystemsOptoelectronicsOptical MaterialsOptical PropertiesComputational ImagingMedicine

Publications per year

2001–2006

3

Publications

3

Aerial image measurement methods for fast aberration set-up and illumination pupil verification

Hans van der Laan, Marcel Dierichs, Henk van Greevenbroek et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 42 citations

Optimizing and enhancing optical systems to meet the low k 1 challenge

Donis G. Flagello, Robert Socha, Xuelong Shi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 22 citations

Optical Materials, Engineering, Microscopy +30

Enabling the 45nm node by hyper-NA polarized lithography

Wim de Boeij, G. H. P. M. Swinkels, Nicolas le Masson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 10 citations

Optical Materials, Engineering, Electron-beam Lithography +24

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