Concepedia

Paul Hinnen

PH

Statistics

Publications

14

Citations

323

H-Index

12

Active since

1994

Affiliations

ASML (Netherlands)(Current)

Vrije Universiteit Amsterdam

Paul Hinnen is an author at ASML (Netherlands) specializing in natural sciences, physics, and spectroscopy.

Publications per year

1994–2018

14

Publications

14

Rydberg-valence interactions of CO, and spectroscopic evidence characterizing the C′ 1Σ+ valence state

M. Eidelsberg, Françoise Launay, K. Ito et al. · The Journal of Chemical Physics · 2004 · 44 citations · Full text

Natural Sciences, Chemistry, Physics +14

Sub-Doppler laser spectroscopy of H<sub>2</sub> and D<sub>2</sub> in the range 91–98 nm

Paul Hinnen, W. Hogervorst, S. Stolte et al. · Canadian Journal of Physics · 1994 · 41 citations · Full text

Natural Sciences, Physics, Molecular Physics +14

Holistic approach for overlay and edge placement error to meet the 5nm technology node requirements

Jan Mulkens, Michael Kubis, Wim Tel et al. · 2018 · 33 citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

Holistic optimization architecture enabling sub-14-nm projection lithography

Jan Mulkens, Paul Hinnen, Michael Kubis et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 31 citations

Engineering, Manufacturing Engineering, Design Automation +12

xuv-laser spectroscopy of HD at 92–98 nm

Paul Hinnen, S.E. Werners, S. Stolte et al. · Physical Review A · 1995 · 31 citations · Full text

Natural Sciences, Chemistry, Physics +14

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