Jan B. van Schoot - Concepedia

Author

Jan B. van Schoot

Also Known As

Jan B. van Schoot

Publications

148

Citations

H-Index

Concepts

All Affiliations

Jan B. van Schoot is an author at Mapper Lithography (Netherlands) specializing in engineering, ophthalmology, and computational imaging.

#	Concept	H-Index	Publications	Citations
1	Engineering	5	5	117
2	Health Sciences	2	2	45
3	Medicine	1	1	22
4	Applied Physics	1	1	28
5	Biostatistics	1	1	22

Jan B. van Schoot

Publications

117

Citations

H-Index

Page 1

	Year	Citations
Mask error factor: causes and implications for process latitude Jan B. van Schoot, Jo Finders, Koen van Ingen Schenau, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyMeasurementSpatial UncertaintyOptic Design	1999	28
Performance of a step-and-scan system for DUV lithography Gerard de Zwart, Martin A. van den Brink, Richard A. George, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyOptic DesignDuv LithographyBeam Optic	1997	23
Optimizing and enhancing optical systems to meet the low k 1 challenge Donis G. Flagello, Robert Socha, Xuelong Shi, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Optical MaterialsEngineeringMicroscopyOptic DesignOptical Testing	2003	22
CD uniformity improvement by active scanner corrections Jan B. van Schoot, O.F.J. Noordman, Peter Vanoppen, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyMeasurementMicroscopySignal Integrity	2002	22
Understanding systematic and random CD variations using predictive modeling techniques Donis G. Flagello, Hans van der Laan, Jan B. van Schoot, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringOptic DesignRare Event EstimationStatistical AnalysisIllumination Modeling	1999	22

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