A. Grouillet

Low-loss PECVD silica channel waveguides for optical communications

G. Grand, Jean Jadot, Hervé Denis et al. · Electronics Letters · 1990 · 68 citations

Channel Waveguides, Photonics, Waveguides +11

Ultra-shallow, super-doped and box-like junctions realized by laser-induced doping

G. Kerrien, J. Boulmer, D. Débarre et al. · Applied Surface Science · 2002 · 30 citations

Semiconductor Technology, Engineering, Physics +4

Plasma doping for shallow junctions

Matthew Goeckner, Susan B. Felch, Ziwei Fang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 28 citations

Shallow Junctions, Engineering, Bf3 Plasma +17

Integrated optical spectrum analyser using planar technology on oxidised silicon substrate

S. Valette, J. Lizet, P. Mottier et al. · Electronics Letters · 1983 · 24 citations

Optical Materials, Engineering, Device Integration +22

Plasma Diagnostics in Pulsed Plasma Doping (P<tex>$^2$</tex>LAD) System

B.-W. Koo, Ludovic Godet, Svetlana Radovanov et al. · IEEE Transactions on Plasma Science · 2004 · 24 citations

Engineering, Plasma Science, Plasma Physics +17