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Integrated optical spectrum analyser using planar technology on oxidised silicon substrate
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1983
Year
Optical MaterialsEngineeringDevice IntegrationOptical TestingIntegrated CircuitsMicroelectronic ProcessesOxidised Silicon SubstrateOptical CharacterizationSilicon On InsulatorProgrammable PhotonicsOptical ComputingEntire Planar TechnologyPlanar TechnologyOptical PropertiesPhotonic Integrated CircuitInstrumentationPlanar Waveguide SensorPhotonicsOptical Spectrum AnalyserComputer EngineeringMicroelectronicsSpectroscopyApplied PhysicsOptical EngineeringOptoelectronics
We report, for the first time, the achievement of an integrated optical spectrum analyser on oxidised silicon substrate. This device uses an entire planar technology fully compatible with microelectronic processes.