Statistics
Publications
20
Citations
396
H-Index
14
Active since
2009
Affiliations
Kathleen Nafus is an author at IMEC specializing in materials engineering, materials science, and electronic materials.
Publications per year
2009–2022
20
20
All track directed self-assembly of block copolymers: process flow and origin of defects
Paulina A. Rincon Delgadillo, Roel Gronheid, Christopher J. Thode et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 48 citations
Natural Sciences, Materials Engineering, Materials Science +15
Advances in directed self assembly integration and manufacturability at 300 mm
Benjamen M. Rathsack, Mark Somervell, Makato Muramatsu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations
Engineering, Manufacturing Engineering, Materials Engineering +15
Process sensitivities in exemplary chemo-epitaxy directed self-assembly integration
Paulina A. Rincon Delgadillo, Roel Gronheid, Guanyang Lin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 22 citations
Natural Sciences, Materials Engineering, Materials Science +17
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