Kathleen Nafus

All track directed self-assembly of block copolymers: process flow and origin of defects

Paulina A. Rincon Delgadillo, Roel Gronheid, Christopher J. Thode et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 48 citations

Natural Sciences, Materials Engineering, Materials Science +15

Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow

Hari Pathangi, Boon Teik Chan, Hareen Bayana et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 38 citations

Natural Sciences, Materials Engineering, Materials Science +17

Advances in directed self assembly integration and manufacturability at 300 mm

Benjamen M. Rathsack, Mark Somervell, Makato Muramatsu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations

Engineering, Manufacturing Engineering, Materials Engineering +15

Comparison of directed self-assembly integrations

Mark Somervell, Roel Gronheid, Joshua Hooge et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 26 citations

Engineering, Manufacturing Engineering, Materials Science +12

Process sensitivities in exemplary chemo-epitaxy directed self-assembly integration

Paulina A. Rincon Delgadillo, Roel Gronheid, Guanyang Lin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 22 citations

Natural Sciences, Materials Engineering, Materials Science +17