J. Shepard

A Kinetic Model for Step Coverage by Atomic Layer Deposition in Narrow Holes or Trenches

Roy G. Gordon, Dennis M. Hausmann, E. Kim et al. · Chemical Vapor Deposition · 2003 · 390 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Design and characteristics of the lightly doped drain-source (LDD) insulated gate field-effect transistor

S. Ogura, P.J. Tsang, William W. Walker et al. · IEEE Transactions on Electron Devices · 1980 · 320 citations

Engineering, Electrical Engineering, Electronic Materials +16

The wafer flexure technique for the determination of the transverse piezoelectric coefficient (d31) of PZT thin films

J. Shepard, Paul Moses, Susan Trolier‐McKinstry · Sensors and Actuators A Physical · 1998 · 192 citations

Natural Sciences, Electrical Engineering, Materials Science +12

Characterization and aging response of the d31 piezoelectric coefficient of lead zirconate titanate thin films

J. Shepard, Fan Chu, Isaku Kanno et al. · Journal of Applied Physics · 1999 · 125 citations

Natural Sciences, Materials Engineering, Materials Science +17

Fabrication of high-performance LDDFET's with Oxide sidewall-spacer technology

P.J. Tsang, S. Ogura, William W. Walker et al. · IEEE Transactions on Electron Devices · 1982 · 115 citations

Engineering, Electrical Engineering, Materials Science +10