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The wafer flexure technique for the determination of the transverse piezoelectric coefficient (d31) of PZT thin films

Materials EngineeringMaterials SciencePzt Thin FilmsEngineeringSoft ModePiezoelectric NanogeneratorsApplied PhysicsPiezoelectricityPiezoelectric MaterialTransverse Piezoelectric CoefficientThin FilmsPyroelectricityWafer Flexure Technique