Concepedia

M. Armacost

MA

8

Publications

335

Citations

8

H-Index

1991

Active since

Affiliations

IBM (United States)(Current)

Applied Materials (United States)

Infineon Technologies (United States)

M. Armacost is an author at IBM (United States) specializing in engineering, electrical engineering, and computer engineering.

Top concepts

EngineeringElectrical EngineeringMicroelectronicsComputer EngineeringApplied PhysicsMicrofabricationElectronic PackagingComputer ArchitectureBig DataData Science

Publications per year

1991–2016

8

Publications

8

Big Data Capabilities Applied to Semiconductor Manufacturing Advanced Process Control

James Moyne, Jamini Samantaray, M. Armacost · IEEE Transactions on Semiconductor Manufacturing · 2016 · 84 citations

Engineering, Big Data Analytics, Digital Manufacturing +21

Plasma-etching processes for ULSI semiconductor circuits

M. Armacost, P.D. Hoh, Rich Wise et al. · IBM Journal of Research and Development · 1999 · 57 citations

Engineering, Electron-beam Lithography, Optoelectronic Devices +17

The evolution of IBM CMOS DRAM technology

E.L. Adler, J. DeBrosse, Steven J. Holmes et al. · IBM Journal of Research and Development · 1995 · 51 citations

Hardware Security, Electrical Engineering, Engineering +14

A high reliability metal insulator metal capacitor for 0.18 μm copper technology

M. Armacost, A. Augustin, P. Felsner et al. · 2002 · 49 citations

Electrical Engineering, μM Copper Technology, Engineering +11

Role of ions, photons, and radicals in inducing plasma damage to ultra low-<i>k</i> dielectrics

Hualiang Shi, Huai Huang, J. Bao et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 44 citations

Optical Materials, Engineering, Laser Applications +20

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