Concepedia

M. Armacost

MA

Statistics

Publications

8

Citations

340

H-Index

8

Active since

1991

Affiliations

IBM (United States)(Current)

Applied Materials (United States)

Infineon Technologies (United States)

M. Armacost is an author at IBM (United States) specializing in engineering, semiconductor devices, and electrical engineering.

Publications per year

1991–2016

8

Publications

8

Big Data Capabilities Applied to Semiconductor Manufacturing Advanced Process Control

James Moyne, Jamini Samantaray, M. Armacost · IEEE Transactions on Semiconductor Manufacturing · 2016 · 88 citations

Engineering, Manufacturing Engineering, Big Data Analytics +15

Plasma-etching processes for ULSI semiconductor circuits

M. Armacost, P.D. Hoh, Rich Wise et al. · IBM Journal of Research and Development · 1999 · 57 citations

Engineering, Electrical Engineering, Materials Science +17

The evolution of IBM CMOS DRAM technology

E.L. Adler, J. DeBrosse, Steven J. Holmes et al. · IBM Journal of Research and Development · 1995 · 51 citations

Engineering, Computer Engineering, Electrical Engineering +17

A high reliability metal insulator metal capacitor for 0.18 μm copper technology

M. Armacost, A. Augustin, P. Felsner et al. · 2002 · 50 citations

Engineering, Electrical Engineering, Materials Science +17

Role of ions, photons, and radicals in inducing plasma damage to ultra low-<i>k</i> dielectrics

Hualiang Shi, Huai Huang, J. Bao et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 44 citations

Natural Sciences, Materials Science, Physics +17

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