Statistics
Publications
40
Citations
1.3K
H-Index
19
Active since
2000
Huai Huang is an author at IBM (United States) specializing in materials science, electronic materials, and engineering.
Publications per year
2000–2021
40
40
Plasma processing of low-k dielectrics
Mikhaı̈l R. Baklanov, Jean‐François de Marneffe, Denis Shamiryan et al. · Journal of Applied Physics · 2013 · 289 citations
Natural Sciences, Materials Engineering, Materials Science +16
Mechanistic study of plasma damage of low k dielectric surfaces
J. Bao, Hua‐Tian Shi, J. Liu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 102 citations
Natural Sciences, Materials Engineering, Materials Science +15
Future on-chip interconnect metallization and electromigration
Chunhua Hu, James J. Kelly, Huai Huang et al. · 2018 · 70 citations
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