29
Publications
730
Citations
19
H-Index
2007
Active since
Hua‐Tian Shi is an author at Anhui University of Technology specializing in engineering, chemistry, and inorganic chemistry.
Top concepts
EngineeringChemistryMaterial ScienceInorganic ChemistryChemical EngineeringSurface ScienceApplied PhysicsSelf-assemblyElectrical InsulationPhysics
Publications per year
2007–2023
29
29
Mechanistic study of plasma damage of low k dielectric surfaces
J. Bao, Hua‐Tian Shi, J. Liu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 101 citations
Materials Science, Materials Engineering, Chemical Engineering +14
Rows per page
1–5 of 29