19
Publications
1.7K
Citations
15
H-Index
1995
Active since
J. Liu is an author at The University of Texas at Austin specializing in engineering, materials science, and applied physics.
Top concepts
EngineeringApplied PhysicsMaterial ScienceElectrical EngineeringNanoelectronicsSurface ScienceMicroelectronicsChemistryMaterials EngineeringPhysics
Publications per year
1995–2009
19
19
Mechanistic study of plasma damage of low k dielectric surfaces
J. Bao, Hua‐Tian Shi, J. Liu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 101 citations
Materials Science, Materials Engineering, Chemical Engineering +14
Rows per page
1–5 of 19