Concepedia

J. Bao

JB

8

Publications

274

Citations

8

H-Index

2005

Active since

Affiliations

The University of Texas at Austin(Current)

Intel (United States)

J. Bao is an author at The University of Texas at Austin specializing in materials science, engineering, and surface science.

Top concepts

EngineeringMaterial ScienceSurface ScienceApplied PhysicsChemical EngineeringChemistryElectrical InsulationPhysicsPlasma PhysicsOptical Properties

Publications per year

2005–2011

8

Publications

8

Mechanistic study of plasma damage of low k dielectric surfaces

J. Bao, Hua‐Tian Shi, J. Liu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 101 citations

Materials Science, Materials Engineering, Chemical Engineering +14

Role of ions, photons, and radicals in inducing plasma damage to ultra low-<i>k</i> dielectrics

Hualiang Shi, Huai Huang, J. Bao et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 44 citations

Optical Materials, Engineering, Laser Applications +20

Origin of dielectric loss induced by oxygen plasma on organo-silicate glass low-k dielectrics

Hua‐Tian Shi, J. Bao, Ryan Scott Smith et al. · Applied Physics Letters · 2008 · 36 citations

Materials Science, Glass-ceramic, Engineering +12

Oxygen plasma damage to blanket and patterned ultralow-κ surfaces

J. Bao, Hua‐Tian Shi, Huai Huang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2010 · 29 citations

Materials Science, Plasma Electronics, Engineering +12

Effects of surface chemistry on ALD Ta3N5 barrier formation on low-k dielectrics

J. Liu, J. Bao, M. Scharnberg et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 23 citations

Aluminium Nitride, Engineering, Substrate Surface Chemistry +18

Rows per page

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