Concepedia

J. Bao

JB

Statistics

Publications

8

Citations

275

H-Index

8

Active since

2005

Affiliations

The University of Texas at Austin(Current)

Intel (United States)

J. Bao is an author at The University of Texas at Austin specializing in materials science, natural sciences, and dielectrics.

Publications per year

2005–2011

8

Publications

8

Mechanistic study of plasma damage of low k dielectric surfaces

J. Bao, Hua‐Tian Shi, J. Liu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 102 citations

, , +15

Role of ions, photons, and radicals in inducing plasma damage to ultra low-<i>k</i> dielectrics

Hualiang Shi, Huai Huang, J. Bao et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 44 citations

, , +17

Origin of dielectric loss induced by oxygen plasma on organo-silicate glass low-k dielectrics

Hua‐Tian Shi, J. Bao, Ryan Scott Smith et al. · Applied Physics Letters · 2008 · 36 citations

, , +17

Oxygen plasma damage to blanket and patterned ultralow-κ surfaces

J. Bao, Hua‐Tian Shi, Huai Huang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2010 · 29 citations

, , +17

Effects of surface chemistry on ALD Ta3N5 barrier formation on low-k dielectrics

J. Liu, J. Bao, M. Scharnberg et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 23 citations

, , +17

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