J. Bao

Mechanistic study of plasma damage of low k dielectric surfaces

J. Bao, Hua‐Tian Shi, J. Liu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 101 citations

Materials Science, Materials Engineering, Chemical Engineering +14

Role of ions, photons, and radicals in inducing plasma damage to ultra low-<i>k</i> dielectrics

Hualiang Shi, Huai Huang, J. Bao et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 44 citations

Optical Materials, Engineering, Laser Applications +20

Origin of dielectric loss induced by oxygen plasma on organo-silicate glass low-k dielectrics

Hua‐Tian Shi, J. Bao, Ryan Scott Smith et al. · Applied Physics Letters · 2008 · 36 citations

Materials Science, Glass-ceramic, Engineering +12

Oxygen plasma damage to blanket and patterned ultralow-κ surfaces

J. Bao, Hua‐Tian Shi, Huai Huang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2010 · 29 citations

Materials Science, Plasma Electronics, Engineering +12

Effects of surface chemistry on ALD Ta3N5 barrier formation on low-k dielectrics

J. Liu, J. Bao, M. Scharnberg et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 23 citations

Aluminium Nitride, Engineering, Substrate Surface Chemistry +18