P. Felsner

Investigation of the different discharge mechanisms in pseudospark discharges

M. Stetter, P. Felsner, J. Christiansen et al. · IEEE Transactions on Plasma Science · 1995 · 59 citations

Engineering, Framing Photography, Glow Discharge +18

A 0.13 μm CMOS platform with Cu/low-k interconnects for system on chip applications

T. Schiml, S. Biesemans, G. Brase et al. · 2002 · 53 citations

Low-power Electronics, Electrical Engineering, Engineering +14

A high reliability metal insulator metal capacitor for 0.18 μm copper technology

M. Armacost, A. Augustin, P. Felsner et al. · 2002 · 49 citations

Electrical Engineering, μM Copper Technology, Engineering +11

First experimental observation of the ignition of a ‘‘superdense glow’’ before the glow-to-arc transition in a pseudospark discharge

M. Stetter, P. Felsner, J. Christiansen et al. · Journal of Applied Physics · 1996 · 29 citations

Superdense Glow, Homogeneous Superdense Glow, Electrical Engineering +15

Investigations of cathode phenomena in pseudospark discharges

P. Felsner, M. Stetter, Werner Hartmann et al. · Journal of Applied Physics · 1994 · 27 citations

Pseudospark Discharges, Electrical Engineering, Plasma Electronics +12