I. Plotnik

Fabrication of sub-100-nm linewidth periodic structures for study of quantum effects from interference and confinement in Si inversion layers

A.C. Warren, I. Plotnik, Erik H. Anderson et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 33 citations

Engineering, Electrical Engineering, Materials Science +17

<i>I</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> stress monitoring and deposition of zero-stress W for x-ray masks

Y.-C. Ku, Lee-Peng Ng, R. Carpenter et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +13

&lt;title&gt;Fabrication of high-energy x-ray transmission gratings for the Advanced X-ray Astrophysics Facility (AXAF)&lt;/title&gt;

Mark L. Schattenburg, Richard Aucoin, Robert C. Fleming et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +13

Reactive-ion etching of 0.2 μm period gratings in tungsten and molybdenum using CBrF3

Mark L. Schattenburg, I. Plotnik, Henry I. Smith · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 19 citations

Natural Sciences, Materials Engineering, Materials Science +17

Low Stress Tungsten Absorber for X-ray Masks

Y. Ku, Henry I. Smith, I. Plotnik · Microelectronic Engineering · 1990 · 17 citations

Engineering, Materials Engineering, Materials Science +13