Y.-C. Ku

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Active since

1991

Affiliations

Massachusetts Institute of Technology(Current)

Y.-C. Ku is an author at Massachusetts Institute of Technology specializing in mechanical behavior of materials, resonant frequency, and field-effect transistors.

Publications per year

1991–2023

Publications

Complementary Field-Effect Transistor (CFET) Demonstration at 48nm Gate Pitch for Future Logic Technology Scaling

Siyong Liao, T.K. Chiu, Wei-Xiang You et al. · 2023 · 56 citations

Engineering, Electrical Engineering, Microelectronics +14

I n s i t u stress monitoring and deposition of zero-stress W for x-ray masks

Y.-C. Ku, Lee-Peng Ng, R. Carpenter et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +13

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