Robert C. Fleming

Statistics

Publications

Citations

178

H-Index

Active since

1994

Affiliations

Massachusetts Institute of Technology(Current)

Robert C. Fleming is an author at Massachusetts Institute of Technology specializing in materials science, optical materials, and materials engineering.

Publications per year

1994–2003

Publications

Optically matched trilevel resist process for nanostructure fabrication

Mark L. Schattenburg, Richard Aucoin, Robert C. Fleming · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 85 citations

Natural Sciences, Materials Engineering, Materials Science +15

Fabrication of sawtooth diffraction gratings using nanoimprint lithography

Chih‐Hao Chang, Ralf K. Heilmann, Robert C. Fleming et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 48 citations

Engineering, Manufacturing Engineering, Materials Science +17

<title>Fabrication of high-energy x-ray transmission gratings for the Advanced X-ray Astrophysics Facility (AXAF)</title>

Mark L. Schattenburg, Richard Aucoin, Robert C. Fleming et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +13

Nanoscale freestanding gratings for ultraviolet blocking filters

J.T.M. van Beek, Robert C. Fleming, P. Hindle et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 21 citations

Engineering, Materials Engineering, Materials Science +12

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