Concepedia

Low Stress Tungsten Absorber for X-ray Masks

Y. Ku, Henry I. Smith, I. Plotnik

Microelectronic Engineering · 1990 · 17 citations · 4 references

DOI

Concepts

References

4

Stress and microstructure in tungsten sputtered thin films

Anne‐Marie Haghiri‐Gosnet, F. R. Ladan, Charly Mayeux et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 99 citations

, , +17

Improved tungsten absorber technology for sub-half-micron x-ray lithography

H. Luethje, M. Harms, A. V. Bruns et al. · Microelectronic Engineering · 1987 · 12 citations

, , +14

Reduction in x-ray mask distortion using amorphous WN<i>x</i> absorber stress compensated with ion bombardment

Toshihiko Kanayama, Minoru Sugawara, J. Itoh · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 12 citations

, , +13

Influence of absorber stress on the precision of x-ray masks

K.‐H. Müller, P. Tischer, W. Windbracke · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 11 citations

, , +15