Concepedia

Improved tungsten absorber technology for sub-half-micron x-ray lithography

H. Luethje, M. Harms, A. V. Bruns, U. Mackens

Microelectronic Engineering · 1987 · 12 citations · 1 references

DOI

Concepts

References

1

Defects in x-ray masks: Detection and printability

A. Kluwe, K.‐H. Müller, H. Betz et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 12 citations

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