H. Betz

Production of separation-nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplastics

Eberhard Backer, W. Ehrfeld, D. Münchmeyer et al. · Die Naturwissenschaften · 1982 · 199 citations

Materials Science, Chemical Engineering, Engineering +9

Computer simulations of resist profiles in x-ray lithography

K. Heinrich, H. Betz, A. Heuberger et al. · Journal of Vacuum Science and Technology · 1981 · 29 citations

Engineering, Electron-beam Lithography, Polycapillary Optics +18

Resolution limits in x-ray lithography calculated by means of x-ray lithography simulator <scp>X</scp> <scp>M</scp> <scp>A</scp> <scp>S</scp>

H. Betz, K. Heinrich, A. Heuberger et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 24 citations

Optical Materials, Engineering, Electron-beam Lithography +18

Heating and temperature-induced distortions of silicon x-ray masks

K. Heinrich, H. Betz, A. Heuberger · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1983 · 23 citations

Electrical Engineering, Engineering, Physics +15

Measurements on the efficiency of acoustic delay lines in view of beam lines for synchrotron radiation

H. Betz, Peter J. Hofbauer, A. Heuberger · Journal of Vacuum Science and Technology · 1979 · 19 citations

Aeroacoustics, Synchrotron Radiation, Beam Line +15