H. Betz - Concepedia

Author

H. Betz

Fraunhofer-Gesellschaft

Also Known As

Betz,H. T., H Betz, H. Betz, H. T. BETZ, H. T. Betz, H.T. Betz, Hans Betz

Publications

478

Citations

H-Index

Concepts

All Affiliations

Fraunhofer-Gesellschaft Fraunhofer Institute for Microengineering and Microsystems Siemens (Germany)

About

H. Betz is an author at Fraunhofer-Gesellschaft specializing in engineering, synchrotron radiation, and applied physics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	12	12	388
2	Applied Physics	8	8	141
3	Health Sciences	5	5	92
4	Chemical Engineering	3	3	229
5	Natural Sciences	1	1	12

H. Betz

Publications

403

Citations

H-Index

Page 1

	Year	Citations
Production of separation-nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplastics Eberhard Backer, W. Ehrfeld, D. Münchmeyer, Die Naturwissenschaften Materials ScienceChemical EngineeringEngineeringNuclear Fuel EnrichmentSelective Separation	1982	199
Computer simulations of resist profiles in x-ray lithography K. Heinrich, H. Betz, A. Heuberger, Journal of Vacuum Science and Technology EngineeringElectron-beam LithographyPolycapillary OpticsX-ray ImagingBeam Lithography	1981	29
Resolution limits in x-ray lithography calculated by means of x-ray lithography simulator <scp>X</scp> <scp>M</scp> <scp>A</scp> <scp>S</scp> H. Betz, K. Heinrich, A. Heuberger, Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena Optical MaterialsEngineeringElectron-beam LithographyMicroscopyIntegrated Circuits	1986	24
Heating and temperature-induced distortions of silicon x-ray masks K. Heinrich, H. Betz, A. Heuberger Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena Electrical EngineeringEngineeringPhysicsHomogeneous Spatial DistributionMask Heating	1983	23
Measurements on the efficiency of acoustic delay lines in view of beam lines for synchrotron radiation H. Betz, Peter J. Hofbauer, A. Heuberger Journal of Vacuum Science and Technology AeroacousticsSynchrotron RadiationBeam LineEngineeringBeam Lines	1979	19
Degradation of polymethylmethacrylate by synchrotron radiation H. Sotobayashi, Frithjof Asmussen, K. Thimm, Polymer Bulletin Chemical EngineeringEngineeringPhotochemistryPolymer ScienceDegradation Reaction	1982	17
Investigations of x-ray exposure using plane scanning mirrors Malte Bieber, H.‐U. Scheunemann, H. Betz, Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena Materials ScienceEngineeringRadiographyOptical PropertiesX-ray Diffraction	1983	15
Investigation of X-ray exposure using plane scanning mirrors Malte Bieber, H. Betz, A. Heuberger Nuclear Instruments and Methods in Physics Research X-ray ExposureInstrumentationSynchrotron RadiationX-ray OpticRadiology	1983	15
Rugate filters by laser flash evaporation of SiO<i>x</i>N<i>y</i> on room-temperature polycarbonate C. S. Bartholomew, Mike Morrow, H. Betz, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Materials SciencePhotonicsChemical EngineeringEngineeringOptical Properties	1988	13
Calculation of the optimum electron energy of a dedicated storage ring for X-ray lithography H. Betz, F.K. Fey, A. Heuberger, IEEE Transactions on Electron Devices EngineeringElectron-beam LithographyDedicated StorageSynchrotron Radiation SourceX-ray Fluorescence	1979	13

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