K. Heinrich

Efficiency, error and yield in light-directed maskless synthesis of DNA microarrays

Christy Agbavwe, Chang-Han Kim, DongGee Hong et al. · Journal of Nanobiotechnology · 2011 · 70 citations · Full text

Computer simulations of resist profiles in x-ray lithography

K. Heinrich, H. Betz, A. Heuberger et al. · Journal of Vacuum Science and Technology · 1981 · 29 citations

Engineering, Electron-beam Lithography, Polycapillary Optics +18

Resolution limits in x-ray lithography calculated by means of x-ray lithography simulator <scp>X</scp> <scp>M</scp> <scp>A</scp> <scp>S</scp>

H. Betz, K. Heinrich, A. Heuberger et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 24 citations

Optical Materials, Engineering, Electron-beam Lithography +18

Heating and temperature-induced distortions of silicon x-ray masks

K. Heinrich, H. Betz, A. Heuberger · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1983 · 23 citations

Electrical Engineering, Engineering, Physics +15

Progress in gene assembly from a MAS-driven DNA microarray

C. Kim, James H. Kaysen, Kathryn Richmond et al. · Microelectronic Engineering · 2006 · 13 citations

Gene Assembly, Natural Sciences, Dna Microarrays +9