68
Publications
1.9K
Citations
23
H-Index
1983
Active since
J. Itoh is an author at National Institute of Advanced Industrial Science and Technology specializing in engineering, applied physics, and electrical engineering.
Top concepts
EngineeringApplied PhysicsElectrical EngineeringMicroelectronicsMaterial SciencePhysicsNanoelectronicsElectronic EngineeringOptoelectronicsNanotechnology
Publications per year
1983–2022
68
68
Role of space charge in scanned probe oxidation
John A. Dagata, Takahito Inoue, J. Itoh et al. · Journal of Applied Physics · 1998 · 168 citations
Fabrication of double-gated Si field emitter arrays for focused electron beam generation
J. Itoh, Yasushi Tohma, Kazutoshi Morikawa et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 107 citations
Electrical Engineering, Engineering, Focused Electron Beams +13
Predictive model for scanned probe oxidation kinetics
John A. Dagata, Francesc Pérez‐Murano, G. Abadal et al. · Applied Physics Letters · 2000 · 107 citations · Full text
Predictive Model, Chemical Engineering, Electrical Engineering +14
Understanding scanned probe oxidation of silicon
John A. Dagata, Takahito Inoue, J. Itoh et al. · Applied Physics Letters · 1998 · 107 citations
Engineering, Microscopy, Chemistry +17
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