1
Publications
107
Citations
1
H-Index
1995
Active since
Kazutoshi Morikawa is an author specializing in ion beam physics, applied physics, and engineering.
Top concepts
MicroscopyEngineeringApplied PhysicsIon Beam PhysicsMicroelectronicsElectrical Engineering
Publications per year
1995–1995
1
1
Fabrication of double-gated Si field emitter arrays for focused electron beam generation
J. Itoh, Yasushi Tohma, Kazutoshi Morikawa et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 107 citations
Electrical Engineering, Engineering, Focused Electron Beams +13
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